[1] | ISO 14644-1:1999 | Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness | |
[2] | ISO 14644-2:2000 | Cleanrooms and associated controlled environments - Part 2: Specifications for testing and monitoring to prove continued compliance with ISO 14644-1 | |
[3] | ISO 14644-3:2005 | Cleanrooms and associated controlled environments - Part 3: Test methods | |
[4] | ISO 14644-4:2001 | Cleanrooms and associated controlled environments - Part 4: Design, construction and start-up | |
[5] | ISO 14644-5:2004 | Cleanrooms and associated controlled environments - Part 5: Operations | |
[6] | ISO 14644-7:2004 | Cleanrooms and associated controlled environments - Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments) | |
[7] | ISO 14644-8:2006 | Cleanrooms and associated controlled environments - Part 8: Classification of airborne molecular contamination | |
[8] | ISO 14698-1:2003 | Cleanrooms and associated controlled environments. Biocontamination control - Part 1: General principles and methods | |
[9] | ISO 14698-2:2003 | Cleanrooms and associated controlled environments. Biocontamination control - Part 2: Evaluation and interpretation of biocontamination data |
УДК 543.275.083:628.511:006.354 | ОКС 13.040.35 |
Ключевые слова: чистые помещения, контролируемые среды |
Электронный текст документа
подготовлен АО "Кодекс" и сверен по:
официальное издание
М.: Стандартинформ, 2019